Study on Phase Shifting Algorithm and System of White Light Interference

Abstract

The white-light interferometry (WLI) has been widely used in 3D topography measurement. This paper introduces a white light phase shifting method for interferometry with the combination of Hariharan phase shifting and WLI. A micro/nanolevel mechanic system was designed and built for the experiments. To verify system accuracy and feasibility, a 100nm step height standard was measured by the designed system and the metrological nanomeasurement machine (NMM). Results of 102.7nm and 102.5nm are obtained respectively. En value of 0.14 is calculated, demonstrating the reliability of result measured by the system. Based on classic nanoquantity traceability system, the measurement results can effectively traced back to the definition of nanometer magnitude, which can improve the accuracy of measurement.